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Characterization of the Non-uniform Reaction in Chemically Amplified Calix[4]resorcinarene Molecular Resist Thin Films1

Vivek M. Prabhu A F , Shuhui Kang A , R. Joseph Kline A , Dean M. DeLongchamp A , Daniel A. Fischer B , Wen-li Wu A , Sushil K. Satija C , Peter V. Bonnesen D , Jing Sha E and Christopher K. Ober E
+ Author Affiliations
- Author Affiliations

A Polymers Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

B Ceramics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

C Center for Neutron Research, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

D Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.

E Cornell University, Materials Science and Engineering, Ithaca, NY 14853, USA.

F Corresponding author. Email: vprabhu@nist.gov

Australian Journal of Chemistry 64(8) 1065-1073 https://doi.org/10.1071/CH11242
Submitted: 15 June 2011  Accepted: 19 July 2011   Published: 19 August 2011



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