
%0 Journal Article
%A Aizawa, Takao 
%A Tsunoda, Takafumi 
%A Sekine, Toru 
%A Kunimi, Takashi 
%A Ito, Shunichiro 
%A Kato, Ayato 
%A Matsuoka, Toshifumi 
%T Development of the high sensitivity MEMS accelerometer for oil and gas exploration
%J ASEG Extended Abstracts
%D 2013/08/12
%V 2013
%N 1
%P 1-4
%K 
%R https://doi.org/10.1071/ASEG2013AB340
%U https://www.publish.csiro.au/paper/ASEG2013AB340 
%X Seismic reflection survey is the main technique for exploring the underground. While the position is not expected to change in the near future, the data quality in resolution and S/N ratio is always subject of improvement. The authors have developed the high resolution MEMS accelerometer for oil and natural gas exploration. In this research, the form of a MEMS element, size and electronic circuit were modified to enhance sensitivity of a prototype of MEMS to use in a MEMS accelerometer. The MEMS sensor made as an experiment by this research surpassed -130 dB/â??Hz which is the world highest ever by the performance evaluation test carried out. We are striving towards disseminating the developed MEMS sensors. 
