
%0 Journal Article
%A Shen, Z. X. 
%T Raman microscopy in characterization of Si devices
%J Science Access
%D 2004/06/01
%V 2
%N 1
%P 112-113
%K 
%R https://doi.org/10.1071/SA0402041
%U https://www.publish.csiro.au/paper/SA0402041 
