
TY  - JOUR
A1  - Shen, Z. X. 
T1  - Raman microscopy in characterization of Si devices
JF  - Science Access
JO  - 
Y1  - 2004
VL  - 2
IS  - 1
SP  - 112
EP  - 113
KW  - 
UR  - https://doi.org/10.1071/SA0402041 
ER  -

